Silicon Nitride Ceramic Substrates (Si3N4)

Properties

Material

Si3N4

Colour

Gray

Bulk density

г/см3

≥ 3,20

Surface roughness Ra (grinding)

мкм

—

Roughness of the polished surface (Ra)

мкм

Ra 0,05

Mechanical properties

Flexural strength

МПа

900

Compressive strength

МПа

2500

Elastic modulus

ГПа

315

Vickers Hardness

ГПа

Fracture toughness

7,5

Physical properties

Coefficient of thermal expansion (25-1000°C)

10 -6 /°C

3,1

Thermal conductivity (25°C)

Вт/м∙°K

19

Specific heat capacity

Дж/кг*К

3,1

Heat shock resistance

С

800

Maximum operating temperature

С

1400

Dielectric strength

15

Volumetric resistance (25 С)

≥ 1014

Dielectric constant (1 МГц)

-

9,0 - 10,0

Dielectric losses (1МГц, 25°C)

∙10 -4

4

Technological properties

DBC technology

-

Thick-film technology

-

Thin-film technology